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Tiny 3D Chips

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3D chips

A new approach helps researchers make tiny 3D structures. Pictured are two packaged microchips, each with tiny bridges fabricated on their surfaces.

Credit: MIT

Microelectromechanical systems, or MEMS, are small devices with huge potential. Typically made of components less than 100 microns in size—the diameter of a human hair—they have been used as tiny biological sensors, accelerometers, gyroscopes, and actuators.

From MIT News Office
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